Atom Probe Tomography
CAMECA LEAP 4000X HR
Scientific head : Anabelle Lopez
Type of instrument : high spatial resolution analytical characterization technique
Principle : field effect evaporation of atoms at the surface of a needle sample
Interest of the technique : 3 D materials analysis at atomic level (compositional analysis, compositional and structural imaging,...)
Type de APT : large angle reflectron (time of flight spectrometry)
Analized materials :
- Metallic (conductors)
- Non métallic (semiconductors, oxydes,...)
Spatial resolution :
- 0.4 nm laterally
- < 0.2 nm in depth
Sensibility : < 5 appm
Efficiency : 42 %
Pulses analysis :
- Voltage pulse : shorthigh voltage input pulses (1 ns)
- Laser pulse : femto-seconds laser input pulses
Method of samples preparation : electro-polishing FIB
Samples shape : needle tip with a 50-100 nm apex radius
