Study and Nanoanalysis of Irradiation Effects Group

Focused ion Beam - Scanning Electron Microscope

ZEISS Crossbeam 540

Scientific head : Auriane Etienne

Column :

• « Gemini II » SEM column
• « Capella » FIB Gallium column working from 0.5 to 30 kV

Imaging detector :

•  Annular In-lens secondary and backscattered electron detectors, secondary electron and secondary ion (SESI) detectors
• Retractable YAG backscattered electron detector

Systems :

• Gas injector system (Pt, W and C) OmniGIS II Oxford Instruments
• EDS and EBSD integrated “Octane Super” system EDAX : EDX SDD 60 mm² + high-sensitivity “DigiView” EBSD camera + Forward Scatter Detector (FSD)
• SEM and FIB scanning system « FIBICS NPVE »

Accessories :

• Plasma Cleaner Evactron
• Electron Flood Gun
• Nanomanipulator OmniProbe 400 Oxford Instruments
• SmartSEM and SmartFIB softwares
• X2 specimen holder for thin foil preparation