Study and Nanoanalysis of Irradiation Effects Group

Focused ion Beam - Scanning Electron Microscope

ZEISS Crossbeam 540

Technical managers: Ronan Henry and Fabien Cuvilly

Funding

The SEM-FIB XB540, installed in 2015 at GENESIS - GPM Rouen, was funded by the Région Haute-Normandie in the framework of "Appel à Projets Energie".

Caractéristiques techniques

Columns:

• « Gemini II » SEM column
• « Capella » FIB Gallium column working from 0.5 to 30 kV

Imaging detectors:

•  Inside the chamber:
  • Annular In-lens secondary
  • Backscattered electron detectors
  • Secondary electron and secondary ion (SESI) detectors
• Retractable YAG backscattered electron detector

Systems:

• Gas injector systems (Pt and C) - MonoGIS Orsay Physics
• EDS and EBSD integrated “Octane Super” system EDAX: EDX SDD 60 mm² + high-sensitivity “DigiView” EBSD camera + Forward Scatter Detector (FSD)
• SEM and FIB scanning system « FIBICS NPVE »

Accessories:

• Plasma Cleaner Evactron
• Nanomanipulator OmniProbe 400 Oxford Instruments
• SmartSEM and SmartFIB softwares
• X2 specimen holder for thin foil preparation