Atom Probe
LEAP 4000 X HR and LEAP 4000 HR (CAMECA)
Scientific head : Auriane Etienne
Analyse of :
- Conductor materials (metals) with voltage pulses
- Semi-conductor or isolators materials with laser pulses (specific characteristic of LEAP 4 000 X HR)
High field of view : >100nm
UV laser (specific characteristic of LEAP 4000 X HR) :
- Wavelenth focused : 355 nm
- Spot size : 3µm
Mass resolutions (on Al++, at 50K) :
- At hal maximum : 1000
- At 10% : 475
- At 1% : 275
Repetition rate of :
- Voltage pulses : 200kHz
- Laser pulses : 250kHz (specific characteristic of LEAP 4 000 X HR)
- Maximal acquisition rate : > 2.106 at./h
Minimal temperature of the specimen : 25K
Detection efficiency : 35%
Detection thresholds : until 10ppm
Signal over noise ration : ~1/10000
Résolutions :
- In depth: < 0,1nm
- Lateral: 0,2-0,4nm
