Focused ion Beam – Scanning Electron Microscope
ZEISS Crossbeam 540
Technical managers: Ronan Henry and Fabien Cuvilly
Funding
The SEM-FIB XB540, installed in 2015 at GENESIS – GPM Rouen, was funded by the Région Haute-Normandie in the framework of “Appel à Projets Energie”.
Caractéristiques techniques
Columns:
- « Gemini II » SEM column
- « Capella » FIB Gallium column working from 0.5 to 30 kV
Imaging detectors:
- Inside the chamber:
- Annular In-lens secondary
- Backscattered electron detectors
- Secondary electron and secondary ion (SESI) detectors
- Retractable YAG backscattered electron detector
Systems:
- Gas injector systems (Pt and C) – MonoGIS Orsay Physics
- EDS and EBSD integrated “Octane Super” system EDAX: EDX SDD 60 mm2 + high-sensitivity “DigiView” EBSD camera + Forward Scatter Detector (FSD)
- SEM and FIB scanning system « FIBICS NPVE »
Accessories:
- Plasma Cleaner Evactron
- Nanomanipulator OmniProbe 400 Oxford Instruments
- SmartSEM and SmartFIB softwares
- X2 specimen holder for thin foil preparation
