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    • Atom Probe Tomography CAMECA LEAP 4000X HR

    Atom Probe Tomography CAMECA LEAP 4000X HR

    Scientific head : Anabelle Lopez

     

    Type of instrument : high spatial resolution analytical characterization technique

    Principle : field effect evaporation of atoms at the surface of a needle sample

    Interest of the technique : 3 D materials analysis at atomic level (compositional analysis, compositional and structural imaging,…)

    Type de APT : large angle reflectron (time of flight spectrometry)

    Analized materials :

    • Metallic (conductors)
    • Non métallic (semiconductors, oxydes,…)

    Spatial resolution : 

    • 0.4 nm laterally
    • < 0.2 nm in depth

    Sensibility : < 5 appm

    Efficiency : 42 %

    Pulses analysis :

    • Voltage pulse : shorthigh voltage input pulses (1 ns)
    • Laser pulse : femto-seconds laser input pulses

    Method of samples preparation : electro-polishing FIB

    Samples shape : needle tip with a 50-100 nm apex radius