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Atom Probe

LEAP 4000 X HR and LEAP 4000 HR (CAMECA)

Scientific head : Auriane Etienne

 

Analyse of :

  • Conductor materials (metals) with voltage pulses
  • Semi-conductor or isolators materials with laser pulses (specific characteristic of LEAP 4 000 X HR)

High field of view : >100nm

UV laser (specific characteristic of LEAP 4000 X HR) :

  • Wavelenth focused : 355 nm
  • Spot size : 3µm

Mass resolutions (on Al++, at 50K) :

  • At hal maximum : 1000
  • At 10% :                475
  • At 1% :                  275

Repetition rate of :

  • Voltage pulses :   200kHz
  • Laser pulses : 250kHz (specific characteristic of LEAP 4 000 X HR)
  • Maximal acquisition rate :   > 2.106 at./h 

Minimal temperature of the specimen : 25K

Detection efficiency : 35%

Detection thresholds : until 10ppm

Signal over noise ration : ~1/10000

Résolutions :

  • In depth: < 0,1nm
  • Lateral: 0,2-0,4nm