Atom Probe Tomography

CAMECA LEAP 4000X HR

Scientific head : Anabelle Lopez

 

Type of instrument : high spatial resolution analytical characterization technique

Principle : field effect evaporation of atoms at the surface of a needle sample

Interest of the technique : 3 D materials analysis at atomic level (compositional analysis, compositional and structural imaging,...) 

Type de APT : large angle reflectron (time of flight spectrometry)

Analized materials :

  • Metallic (conductors)
  • Non métallic (semiconductors, oxydes,...)

Spatial resolution : 

  • 0.4 nm laterally
  • < 0.2 nm in depth

Sensibility : < 5 appm

Efficiency : 42 %

Pulses analysis :

  • Voltage pulse : shorthigh voltage input pulses (1 ns)
  • Laser pulse : femto-seconds laser input pulses

Method of samples preparation : electro-polishing FIB

Samples shape : needle tip with a 50-100 nm apex radius